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Quantitative Data Processing in Scanning Probe Microscopy

SPM Applications for Nanometrology

Quantitative Data Processing in Scanning Probe Microscopy by Petr Klapetek
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  • Unlocks the use of Scanning Probe Microscopy (SPM) for nanometrology applications in engineering, physics, life science and earth science settings.
  • Provides practical guidance regarding areas of difficulty such as tip/sample interaction and calibration – making metrology applications achievable.
  • Gives guidance on data collection and interpretation, including the use of software-based modeling (using applications that are mostly freely available).
Elsevier Science; December 2012
336 pages; ISBN 9781455730599
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Title: Quantitative Data Processing in Scanning Probe Microscopy
Author: Petr Klapetek
 
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