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Lithography by Stefan Landis
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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

Wiley; March 2013
ISBN 9781118621189
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Title: Lithography
Author: Stefan Landis
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