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Introduction to Focused Ion Beams

Instrumentation, Theory, Techniques and Practice

Introduction to Focused Ion Beams by Lucille A. Giannuzzi
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Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Springer US; May 2006
376 pages; ISBN 9780387233130
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Title: Introduction to Focused Ion Beams
Author: Lucille A. Giannuzzi; North Carolina State University
 
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