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Shape and Functional Elements of the Bulk Silicon Microtechnique
A Manual of Wet Etched Silicon Structures
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This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.
Subject categories
- Academic > Physics > Electricity and magnetism > Semiconductors
- Academic > Physics > Electricity and magnetism > Silicon carbide
- Academic > Physics > Electricity and magnetism > Semiconductors; Optical properties; Congresses
- Academic > Physics > General > Physics; Tables
- Academic > Physics > Electricity
- Academic > Physics > Physics; Philosophy
- Science > Chemistry
- Technology > Optics
- Technology > Material Science
- Mathematics
ISBNs
3540268766
9783540221098
9783540268765