The Leading eBooks Store Online

for Kindle Fire, Apple, Android, Nook, Kobo, PC, Mac, Sony Reader ...

New to eBooks.com?

Learn more

Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet Etched Silicon Structures

Shape and Functional Elements of the Bulk Silicon Microtechnique
Add to cart
US$ 189.00
(If any tax is payable it will be calculated and shown at checkout.)
This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.
Springer; December 2005
231 pages; ISBN 9783540268765
Read online, or download in secure PDF format