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Industrial Plasma Engineering

Volume 2: Applications to Nonthermal Plasma Processing

Industrial Plasma Engineering by J Reece Roth
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US$ 253.00
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Surface Interactions in Plasma Processing
Atmospheric Pressure Plasma Sources
Vacuum Plasma Sources
Plasma Reactors for Plasma Processing
Specialized Techniques and Devices for Plasma Processing
Parametric Plasma Effects on Plasma Processing
Diagnostics for Plasma Processing
Plasma Treatment of Surfaces
Surface Modification by Implantation and Diffusion
Thin Film Deposition by Evaporative Condensation and Sputtering
Plasma Chemical Vapor Deposition (PCVD)
Plasma Etching
CRC Press; August 2001
641 pages; ISBN 9781420034127
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Title: Industrial Plasma Engineering
Author: J Reece Roth
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