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Optical Diagnostics for Thin Film Processing

Optical Diagnostics for Thin Film Processing by Irving P. Herman
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US$ 195.00
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This single-authored tutorial on optical diagnostic techniques as used to characterize thin films is useful to all researchers and academics in thin films who have little or no experience using optical methodsfor diagnostics and characterization. The book serves as a resource for investigators looking for information to optimize specific applications. Also, the book discusses theory, instrumentation, and applications of each diagnostic technique for those whowish to acquire a complete review of the field.
Continued growth of thin films for micro- and optoelectronics make this a timely publication. Graduate courses are offered on the topic; professional societies such as MRS and AVS offer short courses for which this book is likely to be adopted. Reviewers highly recommend Irving Herman's qualifications as the book's author.

Key Features
* The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing
* Useful as an introduction to the subject or as a resource handbook
* Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing
* Examples emphasize applications in microelectronics and optoelectronics
* Introductory chapter serves as a guide to all optical diagnostics and their applications
* Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic
Elsevier Science; October 1996
783 pages; ISBN 9780080538082
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Title: Optical Diagnostics for Thin Film Processing
Author: Irving P. Herman
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