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SIMOX

SIMOX
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US$ 110.00 (+ tax)
This volume on SIMOX includes an historical perspective of SIMOX developments, fundamental formation mechanisms and emerging techniques, along with SOI material characterisation methods and results, technological processes from RandD to advanced applications and a brief overview of VLSI circuit applications.
The Institution of Engineering and Technology; January 1753
161 pages; ISBN 9781849190640
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