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Characterization in Silicon Processing
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With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: -- The essential processes of Silicon Epitaxial Growth -- Coverage of Polysilicon Conductors, Silicides, Aluminum- and Copper-based Conductors, Tungsten-based Conductors -- Concise summaries of major characterization technologies for silicon and related semiconductor materials, including Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation Analysis and Raman Spectroscopy
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Momentum Press; January 2010
258 pages; ISBN 9781606501115
Read online, or download in secure PDF format
258 pages; ISBN 9781606501115
Read online, or download in secure PDF format
Subject categories
- Academic > Physics > Electricity and magnetism > Semiconductors
- Academic > Physics > Electricity and magnetism > Silicon carbide
- Academic > Physics > Electricity and magnetism > Semiconductors; Optical properties; Congresses
- Academic > Physics > General > Physics; Tables
- Academic > Physics > Electricity
- Academic > Physics > Physics; Philosophy
- Technology > Material Science
ISBNs
1606501119
9781606501092
9781606501115