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Industrial Plasma Engineering, Volume 2by J Reece Roth
CRC Press 2001; US$ 179.95This text is written for physicists and engineers familiar with the principles of industrial plasma engineering, and who need to obtain a thorough understanding of how plasma applications may be used in industry. It contains comprehensive references to primary research, and to industrial patents. more...
Plasma Electronicsby T. Makabe
CRC Press 2006; US$ 139.95Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory. Beginning with an overview of the basic characteristics and applications of low-temperature plasma, preeminent experts Makabe and Petrovic explore... more...
Low Pressure Plasmas and Microstructuring Technologyby Gerhard Franz
Springer 2009; US$ 229.00A monograph that presents a perspective of gas discharge physics and its applications to various industries. It presents an overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams. more...
Plasma Processes and Plasma Kineticsby Boris M. Smirnov
Wiley-VCH 2008; US$ 140.00This problems supplement to plasma physics textbooks covers plasma theory for both science and technology. Written by a renowned plasma scientist, experienced book author and skilled teacher, it treats all aspects of plasma theory in no fewer than 520 very detailed worked-out problems. With this systematic collection the reader will gain a sound understanding of plasma physics in all fields, from fusion and astrophysics to surface treatment. The book also includes the transport of particles as well as radiation in plasmas, and while designed for graduate students and young researchers, it can equally serve as a reference. more...
Fabrication of Nanostructures by Plasma Electrolysisby Mahmood Aliofkhazraei; Alireza Sabour Rouhaghdam
John Wiley & Sons 2011; US$ 155.00In this handbook and ready reference, the authors introduce the concept of plasma electrolysis, explaining how the coatings are characterized and discussing their mechanical and corrosion properties. They then go on to look at specific industrial applications of this powerful and low-cost method, including aerospace, the biomaterials industry as well as in the oil and gas industry. more...
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