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  • Optical Imaging in Projection Microlithographyby Alfred K. Wong

    SPIE 2005; US$ 56.00

    Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system-level view of the... more...

  • Resolution Enhancement Techniques in Optical Lithographyby Alfred K. Wong

    SPIE 2001; US$ 49.00

    Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction,... more...

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