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  • EUV Lithographyby Vivek Bakshi

    SPIE 2009; US$ 96.00

    Editorial Review. Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography,... more...

  • EUV Sources for Lithographyby Vivek Bakshi

    SPIE 2005; US$ 148.00

    This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to... more...

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