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  • Optical Diagnostics for Thin Film Processingby Irving P. Herman

    Elsevier Science 1996; US$ 195.00

    This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the... more...

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