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  • Plasma Etchingby Dennis M. Manos; Daniel L. Flamm

    Elsevier Science 1989; US$ 72.95

    Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry,... more...

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