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  • High Density Plasma Sourcesby Oleg A. Popov

    Elsevier Science 1996; US$ 200.00

    This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many... more...

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