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  • Characterization in Silicon Processingby Yale E. Strausser

    Momentum Press 2010; US$ 98.00

    With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly... more...

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