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  • A User's Guide to Ellipsometryby Harland G. Tompkins

    Elsevier Science 2012; US$ 72.95

    This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates... more...

  • A User's Guide to Ellipsometryby Harland G. Tompkins

    Dover Publications 2013; US$ 16.95

    This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry ? particularly in relation to the semiconductor industry and to studies... more...

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