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- CRC Press 2014; US$ 80.00
Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental... more...
- Springer Japan 2014; US$ 45.45
This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers... more...
- Wiley 2012; US$ 196.00 US$ 169.87
This Book’s focus and intent is to impart an understanding of the practical application of atmospheric plasma for the advancement of a wide range of current and emerging technologies. The primary key feature of this book is the introduction of over thirteen years of practical experimental evidence of successful surface modifications by atmospheric... more...
- Wiley 2011; US$ 176.00 US$ 152.53
In this handbook and ready reference, the authors introduce the concept of plasma electrolysis, explaining how the coatings are characterized and discussing their mechanical and corrosion properties. They then go on to look at specific industrial applications of this powerful and low-cost method, including aerospace, the biomaterials industry as well... more...
- Springer Berlin Heidelberg 2009; US$ 210.40
This monograph presents an up-to-date perspective on gas discharge physics and its applications to various industries. It starts with an overview of the types of plasmas and puts particular emphasis on the microscopic mechanisms of reactive processes. more...
- Wiley 2008; US$ 160.00 US$ 138.67
This problems supplement to plasma physics textbooks covers plasma theory for both science and technology. Written by a renowned plasma scientist, experienced book author and skilled teacher, it treats all aspects of plasma theory in no fewer than 520 very detailed worked-out problems. With this systematic collection the reader will gain a sound understanding... more...
- Elsevier Science 2007; US$ 275.00
Plasma technologies present an environmentally-friendly and versatile way of treating textile materials in order to enhance a variety of properties such as wettability, liquid repellency, dyeability and coating adhesion. Recent advances made in commercially viable plasma systems have greatly increased the potential of using plasma technology in industrial... more...
- CRC Press 2006; US$ 199.95
Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,... more...
- CRC Press 2001; US$ 253.00
Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices that... more...