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Plasma engineering. Applied plasma dynamics

  • Atmospheric Pressure Plasma for Surface Modificationby Rory A. Wolf

    Wiley 2012; US$ 190.00

    Rory Wolf is the Vice President and Technology Director at Enercon Industries Corporation, Menomonee Falls, Wisconsin, USA, and a recognized industry resource in the field of polymer surface modification. He has twenty-eight years of experience within international positions in the plastics and packaging industries, and specific experience in polymer-based... more...

  • Fabrication of Nanostructures by Plasma Electrolysisby Mahmood Aliofkhazraei; Alireza Sabour Rouhaghdam

    Wiley 2011; US$ 170.00

    Plasma electrolysis is one of the new plasma treatments, which has recently attracted the attention of researchers and can be classified under atmospheric pressure plasma treatments. This process can produce surface coatings such as oxides, carbides, carbonitrides, and borides. In this handbook and ready reference, the concept of plasma electrolysis... more...

  • Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring Systemby Seiji Samukawa

    Springer 2014; US$ 54.99

    This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers... more...

  • Industrial Plasma Engineeringby J Reece Roth

    CRC Press 2001; US$ 241.00

    Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices that... more...

  • Low Pressure Plasmas and Microstructuring Technologyby Gerhard Franz

    Springer 2009; US$ 239.00

    A monograph that presents a perspective of gas discharge physics and its applications to various industries. It presents an overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams. more...

  • Plasma Electronicsby Toshiaki Makabe; Zoran Lj. Petrovic

    CRC Press 2006; US$ 199.95

    Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,... more...

  • Plasma Electronics, Second Editionby Toshiaki Makabe; Zoran Lj. Petrovic

    CRC Press 2015; US$ 179.95

    Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental... more...

  • Plasma Processes and Plasma Kineticsby Boris M. Smirnov

    Wiley 2008; US$ 155.00

    Boris M. Smirnov received his PhD in physics from Leningrad State University in 1968. After working in different research positions, he finally accepted a post as head of one of the divisions of the Institute for High Temperatures at the Russian Academy of Sciences in Moscow in 1986. Professor Smirnov is the author and co-author of approximately 30... more...

  • Plasma Technologies for Textilesby Roshan Shishoo

    Elsevier Science 2007; US$ 275.00

    Plasma technologies present an environmentally-friendly and versatile way of treating textile materials in order to enhance a variety of properties such as wettability, liquid repellency, dyeability and coating adhesion. Recent advances made in commercially viable plasma systems have greatly increased the potential of using plasma technology in industrial... more...

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