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Ellipsometry

Most popular at the top

  • Spectroscopic Ellipsometryby Hiroyuki Fujiwara

    Wiley 2007; US$ 225.00

    Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental... more...

  • Handbook of Ellipsometryby Harland Tompkins; Eugene A Irene; Harland Tompkins; Eugene A Irene

    Elsevier Science 2005; US$ 325.00

    The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological... more...

  • Handbook of Deposition Technologies for Films and Coatingsby Rointan F. Bunshah; Rointan F. Bunshah

    Elsevier Science 1994; US$ 219.00

    This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications. more...

  • A User's Guide to Ellipsometryby Harland G. Tompkins

    Elsevier Science 1992; US$ 72.95

    This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates... more...

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