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Plasma Etching

An Introduction

Plasma Etching by Dennis M. Manos
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US$ 72.95
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Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.
Elsevier Science; September 1989
476 pages; ISBN 9780080924465
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Title: Plasma Etching
Author: Dennis M. Manos; Daniel L. Flamm