The Leading eBooks Store Online 4,410,490 members ⚫ 1,532,108 ebooks

New to

Learn more

Micro and Nano Fabrication

Tools and Processes

Micro and Nano Fabrication by Hans H. Gatzen
Buy this eBook
US$ 89.00
(If any tax is payable it will be calculated and shown at checkout.)

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Springer Berlin Heidelberg; January 2015
537 pages; ISBN 9783662443958
Read online, or download in secure PDF format
Title: Micro and Nano Fabrication
Author: Hans H. Gatzen; Volker Saile; Jürg Leuthold
  • News
  • Contents
No entry found