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Micro and Nano Fabrication

Tools and Processes

Micro and Nano Fabrication by Hans H. Gatzen
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Springer Berlin Heidelberg; January 2015
537 pages; ISBN 9783662443958
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Title: Micro and Nano Fabrication
Author: Hans H. Gatzen; Volker Saile; Jürg Leuthold
 
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ISBNs
9783662443941
9783662443958