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Nanopositioning Technologies

Fundamentals and Applications

by Changhai Ru(ed.) ; Xinyu Liu(ed.) ; Yu Sun(ed.)
Nanopositioning Technologies by Changhai Ru
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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Springer International Publishing; December 2015
412 pages; ISBN 9783319238531
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Title: Nanopositioning Technologies
Author: Changhai Ru; Xinyu Liu; Yu Sun
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