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Post-Processing Techniques for Integrated MEMS

Post-Processing Techniques for Integrated MEMS by Sherif Sedky
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The reduction of size in mechanical systems results in a dramatic decrease of power consumption and cost, while greatly improving performance and reliability. For this reason MEMS (microelectromechanical systems) has become of great interest to electrical engineers working in a wide range of application areas, from DNA analysis and medical applications, to digital projection displays and imaging, This cutting-edge book focuses on a the critical process of integrating MEMS with standard pre-processed electronics. It provides engineers, working in a variety of fields, with an innovative process and specific techniques for effectively achieving this integration and taking advantage of the many performance benefits of using MEMS technology in their systems.
Artech House; October 2005
219 pages; ISBN 9781580539029
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Title: Post-Processing Techniques for Integrated MEMS
Author: Sherif Sedky