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Measurement Technology for Micro-Nanometer Devices by Wendong Zhang
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
Wiley; October 2016
352 pages; ISBN 9781118717998
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Title: Measurement Technology for Micro-Nanometer Devices
Author: Wendong Zhang; Xiujian Chou; Tielin Shi; Zongmin Ma; Haifei Bao; Jingdong Chen; Liguo Chen; Dachao Li; Chenyang Xue
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