The Leading eBooks Store Online 4,173,809 members ⚫ 1,357,844 ebooks

New to eBooks.com?

Learn more

High k Gate Dielectrics

High k Gate Dielectrics by Michel Houssa
Buy this eBook
US$ 275.00
(If any tax is payable it will be calculated and shown at checkout.)
The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community.

High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications.
CRC Press; December 2003
612 pages; ISBN 9781420034141
Read online, or download in secure PDF format
Title: High k Gate Dielectrics
Author: Michel Houssa
 
  • News
  • Contents
No entry found