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Micro Electro Mechanical System Design

Micro Electro Mechanical System Design by James J. Allen
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It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.

The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:

  • Understanding the fabrication technologies that are available
  • Recognizing the relevant physics involved for micron scale devices
  • Considering implementation issues applicable to computer aided design
  • Focusing on the engineering details and the subsequent evaluation testing
  • Maintaining an eye for detail regarding both reliability and packaging

    These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.
  • CRC Press; July 2005
    480 pages; ISBN 9781420027754
    Read online, or download in secure PDF format
    Title: Micro Electro Mechanical System Design
    Author: James J. Allen
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