The Leading eBooks Store Online 4,173,809 members ⚫ 1,357,844 ebooks

New to eBooks.com?

Learn more

Run-to-Run Control in Semiconductor Manufacturing

Run-to-Run Control in Semiconductor Manufacturing by James Moyne
Buy this eBook
US$ 172.95
(If any tax is payable it will be calculated and shown at checkout.)
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
CRC Press; November 2000
367 pages; ISBN 9781420040661
Read online, or download in secure PDF format
Title: Run-to-Run Control in Semiconductor Manufacturing
Author: James Moyne; Enrique del Castillo; Arnon M. Hurwitz
 
  • News
  • Contents
No entry found