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Run-to-Run Control in Semiconductor Manufacturing

Run-to-Run Control in Semiconductor Manufacturing by James Moyne
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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
CRC Press; November 2000
367 pages; ISBN 9781420040661
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Title: Run-to-Run Control in Semiconductor Manufacturing
Author: James Moyne; Enrique del Castillo; Arnon M. Hurwitz
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