The Leading eBooks Store Online 4,034,055 members ⚫ 1,328,001 ebooks

New to

Learn more

Spectroscopic Ellipsometry

Principles and Applications

Spectroscopic Ellipsometry by Hiroyuki Fujiwara
Buy this eBook
US$ 239.00 US$ 215.10
(If any tax is payable it will be calculated and shown at checkout.)
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Wiley; September 2007
389 pages; ISBN 9780470060186
Read online, or download in secure PDF format
Title: Spectroscopic Ellipsometry
Author: Hiroyuki Fujiwara
  • News
  • Contents
No entry found