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Optical Imaging in Projection Microlithography

Optical Imaging in Projection Microlithography by Alfred K. Wong
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Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system-level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.
SPIE; March 2005
276 pages; ISBN 9780819478702
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Title: Optical Imaging in Projection Microlithography
Author: Alfred K. Wong