Introduction to Semiconductor Manufacturing Technology (2nd ed.)

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Subject categories
ISBNs
  • 0819490938
  • 9780819490926
  • 9780819490933
  • 9780819490940
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. [i]Introduction to Semiconductor Manufacturing Technologies, Second Edition[/i] thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.
Subject categories
ISBNs
  • 0819490938
  • 9780819490926
  • 9780819490933
  • 9780819490940