Preview "MEMS Mechanical Sensors" in a new window.

MEMS Mechanical Sensors

Authors

Book Description

Here’s the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

This new resource exploresall the major areas of mechanical microsensors and takes an especially closelook at pressure and inertial sensors. Engineers in industry and academia cantap into current and future market trends in such key applications areas formechanical microsensors as force and torque, flow in microfluidics, anddisplacement. A thorough introduction to physical sensors, MEMS, and theproperties of silicon brings you up to speed with the state of the art of thisgroundbreaking technology.

In The Press

About the Author

Read on Your Favourite Devices

to find out more

Ebook Permissions

to find out more

About this Ebook

File formats
This ebook is available in:
The publisher has not yet supplied format information.
Pre-order formats shown are based on publisher intent and may change before release.
File sizes shown are an approximation. The actual download size will vary based on the application you use to read the book.
Publisher
Published
; Copyright:
ISBNs
Title
Series
Author
;
Edition
Imprint
Language
Number of Pages
Page count shown is an approximation provided by the publisher. The actual page count will vary based on various factors such as your device's screen size and font-size.